High rate growth of microcrystalline silicon at low temperatures

By M. Kondo, M. Fukawa, Lihui Guo, A. Matsuda. 2000

278 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/6970ef3c25469b1b73287c32542bb85ef1802e68