The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation

By K. V. Aeken, S. Mahieu, D. Depla. 2008

199 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Radiation

View Paper: https://www.semanticscholar.org/paper/685055bd50b935fce52a2a2e7474aaf59a24c66d