XPS analysis of aluminum nitride films deposited by plasma source molecular beam epitaxy

By L. Rosenberger, R. Baird, E. McCullen, G. Auner, G. Shreve. 2008

330 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/679df0759e60b8960030b3c4475fcd4cf5736c98