Piezoelectric MEMS Resonators

By H. Bhugra, Gianluca Piazza. 2017

148 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/66f9e39b3f788b37da67c967402238fd61e480ce