Atomic Layer Deposition of the Solid Electrolyte LiPON

By A. Kozen, A. Pearse, Chuan-Fu Lin, M. Noked, G. Rubloff. 2015

240 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/66d83d42d839ecaf846f8c1321c5cab5e7ac2293