Recent developments in MEMS sensors: a review of applications, markets and technologies
By R. Bogue. 2013
253 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Computer Networks and Communications, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/65f719c1f560d0edfc72866155906ff626383abe
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In Atomic and Molecular Physics, and Optics
In Computer Networks and Communications
In Electrical and Electronic Engineering
Citations in the corpus
- Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications (2022, background): “They can even have wider applicability, from mechanical to chemical uses and in electrical and civil applications, along with many other fields [6–10].”