Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

By P. Carcia, R. S. Mclean, M. Groner, A. Dameron, S. George. 2009

231 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/65e24df99e2077e5daaf141b43d4a362cc7876e9

Citations in the corpus