Surface Chemistry Studies of Copper Chemical Mechanical Planarization

By J. Hernández, P. Wrschka, G. Oehrlein. 2001

180 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/648ce7925be0e696ffb86d7041a1c15ecf517cfc