Interfacial reactions between thin rare-earth-metal oxide films and Si substrates

By H. Ono, T. Katsumata. 2001

232 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/643a7118c27ce3cc47d6ee5e8495b209a1edbc61