Chemical mechanical polishing (CMP) anisotropy in sapphire

By Honglin Zhu, Luiz A. Tessaroto, R. Sabia, V. Greenhut, Maynard B. Smith, D. Niesz. 2004

181 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/64371e77c56bfff8541b1380ad0c07ae2630d178