Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering

By Guojia Fang, Dejie Li, Bao-Lun Yao. 2002

135 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/63d2907142b0b51bcd59ceffc1013480b85a7fbb