Evolution of ferroelectric HfO2 in ultrathin region down to 3 nm

By X. Tian, S. Shibayama, T. Nishimura, T. Yajima, S. Migita, A. Toriumi. 2018

208 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/639df39ff46db1e763727bfd17e8032c86e0778e