Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing

By P. Chidambaram, C. Bowen, S. Chakravarthi, C. Machala, R. Wise. IEEE Transactions on Electron Devices, 2006

176 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/612320346177bfb21f259c3d84ccb6af1e9bfde4

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In Electrical and Electronic Engineering

  1. Ryosho Nakane

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