Plasma processing of low-k dielectrics

By M. Baklanov, J. D. Marneffe, D. Shamiryan, A. Urbanowicz, Hualiang Shi, T. Rakhimova, Huai Huang, P. Ho. 2013

263 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5ffaba0ca0eb0c3a591f3cffd87c91bdd4c74218