Effects of high-/spl kappa/ gate dielectric materials on metal and silicon gate workfunctions

By Yee-Chia Yeo, P. Ranade, Tsu-Jae King, Chenming Hu. IEEE Electron Device Letters, 2002

158 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/5f9a426c3f03609d4ece987d8e0d8197900ad78d