Fundamental principles of optical lithography : the science of microfabrication

By C. Mack. 2007

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Fabrication methods and applications of microstructured gallium based liquid metal alloys (2016, background): “In microfabrication, the resolution and precision of patterning structures are characterized on the basis of two significant criteria, critical dimension [151] and line edge roughness [152].”
Length scale and manufacturability in density-based topology optimization (2016, background): “A typical production process consists of multiple steps [99] and here it is exemplified in Figure 3.”
Optically Driven Soft Micro Robotics (2018, background): “[37] In photolithography,[38] first a thin homogeneous film of a photoresist is prepared (generally by spin coating) on a glass or metal substrate which subsequently is irradiated by nearly collimated UV light passing through a mask.”