Floating probe for electron temperature and ion density measurement applicable to processing plasmas

By Min-Hyong Lee, S. Jang, C. Chung. 2007

184 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5e6b2927b41378dcb969900bc7cd418c03f35c15