Single and Four-Element $Ka$-Band Transmit/Receive Phased-Array Silicon RFICs With 5-bit Amplitude and Phase Control

By Dong‐Woo Kang, Jeong‐Geun Kim, Byung-Wook Min, Gabriel M. Rebeiz. IEEE transactions on microwave theory and techniques, 2009

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The Search for a Reliable MEMS Switch (2013, background): “However, advances in SiGe and CMOS technologies have resulted in high-performance and highly dense phased array chips [25]–[27], and this has virtually eliminated RF MEMS from the phased array arena except for highly specialized applications (ultralow-power satellite communications (SATCOM), wideban”
60-GHz 64- and 256-Elements Wafer-Scale Phased-Array Transmitters Using Full-Reticle and Subreticle Stitching Techniques (2016, methodology): “RF beamforming [3], [4], [7]–[10], [13], [26], [29]–[35], IF beamforming [6], [27], [36]–[38], LO beamforming [2], and digital beamforming [11], [28] were all proposed, and the All-RF beamforming has been adopted by industry, since”
The Evolution to Modern Phased Array Architectures (2016, methodology): “For low-power arrays at millimeter-wave frequencies, significant progress has been made in integrating complete phased arrays on RF integrated circuits in SiGe BiCMOS technology [31].”
60-GHz Four-Element Phased-Array Transmit/Receive System-in-Package Using Phase Compensation Techniques in 65-nm Flip-Chip CMOS Process (2012, background): “The beam-steering measurement results show acceptable agreement of synthesized and measured array pattern.”