Single crystal diamond wafers for high power electronics

By S. Shikata. 2016

172 citations recorded by the source corpus.

Abstract According to international energy proposal, about 25% of the total CO2 reduction should come from “end use efficiency”. Hence, low loss power devices are an important technology for the 21st century. Diamond-based devices have the potential, but this would require fast development in order to contribute to the CO2 reduction plan early in this century. Here, we present a clear target for the RD a killer defect density less than 0.1 cm− 2, resistivity less than 0.005 Ω cm and a size of 4 in. For the final commercialization stage, targets of zero killer defects, resistivity of 0.001 Ω cm and a size of 6 in. are proposed. The challenges and proposal solutions are reviewed for each technology.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/5cd8a7da06963655f3e3e753f9aee2eaa30a2c10

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In Electrical and Electronic Engineering

  1. Giorgia Longobardi
  2. Florin Udrea
  3. Julien Pernot
  4. Nicolas Rouger
  5. Nicola Donato

In Materials Chemistry

  1. Giorgia Longobardi
  2. Florin Udrea
  3. Julien Pernot
  4. Nicolas Rouger
  5. Nicola Donato

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