Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

By Jian Zhang, K. L. Tan, Hao Gong. 2001

141 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/5ca2f5975e851da28640fbfc61b25f07b2223d66