Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition

By S. Jen, J. A. Bertrand, S. George. 2011

222 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5c79acb21b66c14856c8c0c7da38685d0f5f8aa8