Introduction to Microfabrication: Franssila/Introduction to Microfabrication
By S. Franssila. 2010
198 citations recorded by the source corpus.
Subfields: Automotive Engineering, Biomedical Engineering, Industrial and Manufacturing Engineering
View Paper: https://www.semanticscholar.org/paper/5c1fcc0a1c04fafac460beac844c716529231583