Using high-contrast salty development of hydrogen silsesquioxane for sub-10‐nm half-pitch lithography

By Joel K. W. Yang, K. Berggren. 2007

224 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/5bf4ed2954759bf67edb5f6bf5fe0fcc4076e279