Dimensional micro and nano metrology

By Hans Nørgaard Hansen, K. Carneiro, H Han Haitjema, L. Chiffre. 2006

337 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/5b821ff8747525ed774615d29c084ab3e1208558

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Gerry Byrne
2. Fengzhou Fang
3. A. Razali
4. Wei Gao
5. Hans Nørgaard Hansen
6. Yuebin B. Guo
7. Tugrul Özel
8. Yigit Karpat

In Mechanical Engineering

1. Gerry Byrne
2. Yuebin B. Guo
3. A. Razali
4. Hans Nørgaard Hansen
5. Tugrul Özel
6. Yigit Karpat

Citations in the corpus

• Micro-manufacturing: research, technology outcomes and development issues (2010, background): ““New measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration, etc. will have to be developed” [ 82 ].”
• Nanomanufacturing—Perspective and applications (2017, methodology): “Scanning probe microscopes (SPMs), microcoordinate measuring machines (microCMMs), and optical measurement systems are major dimensional measurement technologies for nanomanufacturing [87].”