Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature

By F. Kurdesau, G. Khripunov, A. D. Cunha, M. Kaelin, A. Tiwari. 2006

184 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/5acc36d43a32cd265ca998744d45a5c68a1a883e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Volker J. Sorger
2. Chenran Ye
3. Ke Liu

Citations in the corpus

• Indium-Tin-Oxide for High-performance Electro-optic Modulation (2015, background): “) was observed, as well as a difference in the crystalline structure andmorphology of the formed layers [53].”