Principles of Chemical Vapor Deposition
By D. Dobkin, M. Zuraw. 2003
172 citations recorded by the source corpus.
Subfields: Electrical and Electronic Engineering, Materials Chemistry, Radiology, Nuclear Medicine and Imaging
View Paper: https://www.semanticscholar.org/paper/5a4424d8727c6a083548fa9a819b9ec658eec321