Thermal budget limits of quarter-micrometer foundry CMOS for post-processing MEMS devices

By Hideki Takeuchi, Amy Wung, Xin Sun, R. T. Howe, Tsu-Jae King. IEEE Transactions on Electron Devices, 2005

164 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/59a5f1d18be90b4283b2d2903e263b4607291ad7