XPS study for reactively sputtered titanium nitride thin films deposited under different substrate bias

By N. Jiang, H. Zhang, S. Bao, Yaogen Shen, Zhifeng Zhou. 2004

137 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5902a1c2d1bc75849bd9ec6a88476a0ecd58b786