Voids in Silicon by He Implantation: From Basic to Applications

By V. Raineri, M. Saggio, E. Rimini. 2000

143 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/58b36e498579870692724cd4479b69837e2c525a