Advanced scanning probe lithography.
By Ricardo Garcia, A. Knoll, E. Riedo. Nature Nanotechnology, 2014
606 citations recorded by the source corpus.
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented its exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on robust methods, such as those based on thermal effects, chemical reactions and voltage-induced processes, that demonstrate a potential for applications.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/589b9f93c85f41ce49b4723581f22b4a24695b4c
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Citations in the corpus
- Recent advance in surface modification for regulating cell adhesion and behaviors (2020, methodology): “Scanning probe microscopy-based lithography (SPML) is a lithography technology based on a scanning probe microscope [84].”