Low-frequency, high-density, inductively coupled plasma sources: Operation and applications

By Shuyan Xu, Ken Ostrikov, Yin-an Li, E. Tsakadze, I. Jones. 2001

196 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/57f65c3670330ac444bc1ffa6cbb47c900aa5f36

How researchers see this paper

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In Electrical and Electronic Engineering

1. Matt Duwe
2. B. Abel
3. C. Ropers
4. M. Sivis

Citations in the corpus

• Extreme-ultraviolet light generation in plasmonic nanostructures (2013, background): “Specifically, for inductively-coupled (IC) discharge plasmas, bistabilities have been studied for a long time, resulting in a large number of reports [97, 98, 99, 100, 120, 121, 119, 122, 123].”