Squeeze film air damping in MEMS

By M. Bao, Heng Yang. 2007

758 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/57ddca46efae8d4aeae761b85f3c4561b401f63f

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Oskar J. Painter
2. Darrick E. Chang
3. Qiang Lin
4. Kerry J. Vahala
5. M. Eichenfield
6. R. Camacho
7. J. Rosenberg
8. Wen Chen

In Biomedical Engineering

1. Wen Chen
2. Eldwin Jiaqiang Ng
3. Darrick E. Chang
4. Jinghui Xu
5. Guoqiang Wu

In Electrical and Electronic Engineering

1. Oskar J. Painter
2. Darrick E. Chang
3. Qiang Lin
4. Kerry J. Vahala
5. M. Eichenfield
6. J. Rosenberg
7. Wen Chen
8. Eldwin Jiaqiang Ng

Citations in the corpus

• Static and dynamic wavelength routing via the gradient optical force (2009, background): “When the pump dropped power is low, the pump back-action on mechanical motion is negligible and the probe response is given by a combination of the intrinsic mechanical stiffness and the squeeze-film effec”
• Coherent mixing of mechanical excitations in nano-optomechanical structures (2009, background): “be described by F̃q(Ω) = fq(Ω)x̃b(Ω), where fq(Ω) represents the spectral response of the squeeze gas film [32].”
• MEMS Resonators for Frequency Reference and Timing Applications (2020, background): “The basic mechanisms of air damping include squeeze film damping and slide film damping [174], [175].”