Nanostructure formation during deposition of TiN SiNx nanomultilayer films by reactive dual magnetron sputtering

By H. Söderberg, M. Odén, Jon Molina-Aldareguia, L. Hultman. 2005

152 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5781264241e4604234d62fa45ca62fb730b65574