A study on mechanism of nano-cutting single crystal silicon

By Fengzhou Fang, H. Wu, Wei Zhou, X. T. Hu. 2007

167 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/55f9efe1ea5699da23e5c3009f8d7ceecca2c6b9

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Gerry Byrne
2. Fengzhou Fang
3. Wei Gao
4. Hans Nørgaard Hansen
5. Yuebin B. Guo
6. Tugrul Özel
7. Yigit Karpat

Citations in the corpus

• Nanomanufacturing—Perspective and applications (2017, background): “Plastic flow would occur in the phase transition region and the phase transition region would be extruded to form the chip as the tool advances [51,57,58].”