The energy balance at substrate surfaces during plasma processing

By H. Kersten, H. Deutsch, H. Steffen, G. Kroesen, R. Hippler. 2001

336 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/55b026c9069fc8ede16bd38fe87c78502dfdb68b

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Materials Chemistry

1. Chongchong Tang

Citations in the corpus

• Oxidation kinetics of Cr-coated zirconium alloy: Effect of coating thickness and microstructure (2020, background): “On the other hand, thicker Cr coatings with porous and columnar microstructure can be formed by hot target sputtering with high rates, when deposited particle flux is mainly composed of low energy sublimated particles [25,26].”