On Generation of Micro-Feature on Silicon with an Industrial Laser
By T. Mon, Tze Chuen Yap, N. Bidin, M. Ishak. 2013
368 citations recorded by the source corpus.
Generation of a micro feature on mono-crystalline silicon surface using an industrial laser is presented. The main objective is to investigate the capability of the industrial laser, Nd:YAG, in generating a micro-feature on silicon surface. The unpolished silicon surface was irradiated with the Nd:YAG laser beam of controlled pulse width and power. In phase 1, the irradiations were done without incorporating an assist gas into the process. In phase 2, the compressed air maintaining its pressure at 4 bars, was supplied as an assist gas during laser irradiation. Design of experiment was adopted to systematically determine the number of experimental runs in each phase as well as to fine tune the important parameters through the statistical analysis. Laser-generated structures were observed under scanning electron microscope. Micrographs reveal that most of the features appear to be cone-like with an almost true circle at the base. The diameter of the cone is found to be as small as 200 m. The quality of such micro-features and analysis of the effect of the process parameters on the feature quality show that in general, laser pulse width has more appreciable effect than the laser power on the micro-feature geometry as well as quality. Laser irradiation without the assist gas produces better results in terms of a feature size .
Subfields: Biomedical Engineering, Computational Mechanics
View Paper: https://www.semanticscholar.org/paper/54b2c66de07debb3fe69d8c87b962618862002e3
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In Biomedical Engineering
Citations in the corpus
- Phase separation of metastable CoCrFeNi high entropy alloy at intermediate temperatures (2016, result): “Besides the experimental results, all the present phase selection models, CALPHAD and first principle calculations indicated that the CoCrFeNi HEA should be a stable single fcc solid-solution phase [28-32].”
- SLM-processed Sc- and Zr- modified Al-Mg alloy: Mechanical properties and microstructural effects of heat treatment (2017, neutral): “[20] Y.V. Milman, D.V. Lotsko, O.I. Sirko, Materials Science Forum, 331-337 (2000) 1107-1112.”
- A review of electrodeposited Ni-Co alloy and composite coatings: Microstructure, properties and applications (2019, result): “The oxidation study of Ni-Co-ZrO2 composite coating at 573, 873 and 1173 K revealed lower weight gain of the coating compared to NieCo alloy coating [290].”