High-mobility nanocrystalline silicon thin-film transistors fabricated by plasma-enhanced chemical vapor deposition

By Czang-Ho Lee, A. Sazonov, Arokia Nathan. 2005

145 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/540afbd316efc09e0e24695f6933ccf71973d38e