Highly Conformal Thin Films of Tungsten Nitride Prepared by Atomic Layer Deposition from a Novel Precursor

By J. Becker, Seigi Suh, Sheng-Chang Wang, R. Gordon. 2003

138 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/52f0f8aa72a6fa23e19a800299656ecaa9521597