Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers

By S. Bajt, D. Stearns, P. Kearney. 2001

161 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/5257a37bb19e4c588a712122f7d08fd3be542bc2