Tensile stress evolution during deposition of Volmer–Weber thin films

By S. Seel, Carl V. Thompson, S. Hearne, J. Floro. 2000

183 citations recorded by the source corpus.

Subfields: Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/51ecdc95c7771d6cd0021ccbdc3326497e256540