Mechanisms and reactions during atomic layer deposition on polymers

By G. Parsons, Sarah E. Atanasov, Erinn C. Dandley, Christina K. Devine, Bo Gong, J. Jur, Kyoungmi Lee, C. Oldham, Qing Peng, Joseph C. Spagnola and 1 more. 2013

193 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/51c34a029c0160ef3d8caee664168338647f8b10