Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

By Yanling Tian, B. Shirinzadeh, D. Zhang. 2010

227 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Control and Systems Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/51610aa4a3123dee1fcf02cb25ecb75b41d7e975