Sputter deposition of transition-metal carbide films - A critical review from a chemical perspective

By Ulf Jansson, E. Lewin. 2013

236 citations recorded by the source corpus.

Subfields: Materials Chemistry, Mechanical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5129a87221603c194cbd2bf2b737cb9a4f43d55b