Plasma etching: Yesterday, today, and tomorrow

By V. Donnelly, A. Kornblit. 2013

731 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4ffc08aef127b451470f7692cd9dc97c03eab8a5

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Keren J. Kanarik
2. R. Gottscho
3. Chris Lee

Citations in the corpus

• The grand challenges of plasma etching: a manufacturing perspective (2014, background): “applications, we refer to the extensive reviews of the field that have been published recently [5, 6].”