Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation

By Chia-Yen Lee, Gwo-Bin Lee. 2003

140 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4fbe255d31e909a093568ff9b9ba6bc4d2937280

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. John Tze-Wei Yeow
2. Mohd Nizar Bin Hamidon

In Bioengineering

1. John Tze-Wei Yeow

In Electrical and Electronic Engineering

1. John Tze-Wei Yeow
2. Yun Wang

Citations in the corpus

• Carbon nanotube-enhanced capillary condensation for a capacitive humidity sensor (2006, background): “14 nF/%RH cantilever with Polyimide [27]”
• Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review (2014, background): “Miniaturization of sensor devices offer numerous advantages such as low hysteresis [15], batch fabrication [16], ease of packaging/integration along with the corresponding cost reductions [17–20].”