The effect of isopropyl alcohol on etching rate and roughness of (1 0 0) Si surface etched in KOH and TMAH solutions

By I. Zubel, Małgorzata Kramkowska. 2001

216 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4f7044522bb80192c96b0e1f7a86d0d7b2ea71ba