Oxygen Plasma and Humidity Dependent Surface Analysis of Silicon, Silicon Dioxide and Glass for Direct Wafer Bonding

By Arif Ul Alam, M. Howlader, M. Deen. 2013

148 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/4e681cd107a41a00d9c004d428e633fdc724e2a7