Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

By Wei Gao, Y. Arai, A. Shibuya, S. Kiyono, Chun-Hong Park. 2006

146 citations recorded by the source corpus.

Subfields: Mechanical Engineering, Statistics and Probability

View Paper: https://www.semanticscholar.org/paper/4d2acabb5a9ed9c0a400a4d47907e1a833b94777