Structural and XPS characterization of ALD Al2O3 coated porous silicon

By I. Iatsunskyi, M. Kempiński, M. Jancelewicz, K. Załȩski, S. Jurga, V. Smyntyna. 2015

310 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/4cee83be09de5417e059b6dc64289589ef8ef9ba