Properties of nitrogen-implanted p-type ZnO films grown on Si3N4/Si by radio-frequency magnetron sputtering

By Chin-Ching Lin, San-Yuan Chen, S. Cheng, Hsin-yi Lee. 2004

166 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/4c17b08542ba4af38d1ed97d512bfc7ff2ef9c9d